The NFF (CWB) TSV Process Laboratory

The NFF (CWB) TSV Process Laboratory (Room 2227) houses an electroplating equipment for metal deposition and polishers for wafer polishing.

 

Equipment List

  • Buehler Polisher #1
  • Buehler Polisher #2
  • Copper Electroplating
  • Silicon Grinder

DETAILS

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