The NFF (CWB) Deep-RIE Process Center

The NFF (CWB) Deep-RIE Process Center (Room 2223) houses two DRIE systems for silicon etching and a surface profiler for measurements.

 

Equipment List

  • STPS Rapier DRIE Etcher
  • STS Multiplex ICP DRIE Etcher
  • KLA-Tencor P-10 Surface Profiler

DETAILS

nffdeeprie process center
The NFF (CWB) Nanofabrication Demonstration Laboratory
Rm 3114, 3/F (Lift no. 19)
The Hong Kong University of Science and Technology
Clear Water Bay
Kowloon, Hong Kong