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Nanosystem Fabrication Facility (CWB)
Nanosystem Fabrication Facility (CWB)
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The NFF (CWB) Phase II Laboratory
The NFF (CWB) Enterprise Center
The NFF (CWB) TSV Process Laboratory
The NFF (CWB) Deep-RIE Process Center
The NFF (CWB) Nanofabrication Demonstration Laboratory
Equipment
Mask-Making Module
Photolithography Module
Wet Etching and CMP Module
Thermal Diffusion and Ion-Implantation Module
Dry Etching and Sputtering Module
Metrology
Technology
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Charging Schemes
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