The NFF (CWB) Deep-RIE Process Center

The NFF (CWB) Deep-RIE Process Center (Room 2223) houses two DRIE systems for silicon etching and a surface profiler for measurements.


Equipment List
  • STPS Rapier DRIE Etcher
  • STS Multiplex ICP DRIE Etcher
  • KLA-Tencor P-10 Surface Profiler
NFF Deep RIE Process Center
The NFF (CWB) Deep-RIE Process Center
Rm 2223, 2/F (Lift no. 23)
The Hong Kong University of Science and Technology
Clear Water Bay
Kowloon, Hong Kong