The NFF (CWB) Phase II Laboratory

The NFF (CWB) Phase II Laboratory occupies a floor area of 750 square meters. It consists of a cleanroom and a plant room. The cleanroom provides class 100, 1,000 and 10,000 environments. It houses equipment for wafer processing. A complete 4" silicon wafer processing line is installed, offering photolithography, thermal diffusion and oxidation, thin-film deposition, dry/wet etching, metallization, implantation, and mask-making services.


Equipment List
NFF Phase II
NFF Phase II
NFF Phase II
The NFF (CWB) Phase II Laboratory
Rm 2240, 2/F (Lift no. 23)
The Hong Kong University of Science and Technology
Clear Water Bay
Kowloon, Hong Kong